Lateral dopant profiling with 200 nm resolution by scanning capacitance microscopy (Q63407120)
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Current Data About Lateral dopant profiling with 200 nm resolution by scanning capacitance microscopy
(P31) (Q13442814)

(P50) (Q62140170)
(P1545) 4
(P1932) H. K. Wickramasinghe

(P304) 1662-1664

(P407) (Q1860)

(P433) 16

(P478) 55

(P577) Monday, October 16, 1989

(P1433) (Q621615)

(P1476) "Lateral dopant profiling with 200 nm resolution by scanning capacitance microscopy" (language: en)

(P2093) C. C. Williams
(P1545) 1

J. Slinkman
(P1545) 2

W. P. Hough
(P1545) 3

(P2860) (Q56429697)
(P248)
(P854) https://api.crossref.org/works/10.1063%2F1.102312
(P813) Sunday, January 21, 2018

(Q63407126)
(P248)
(P854) https://api.crossref.org/works/10.1063%2F1.102312
(P813) Sunday, January 21, 2018

other details

External Links
(P356) 10.1063/1.102312