Internal stress of chemical vapour deposition diamond film on silicon (Q62677951)
scholarly article
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Current Data About Internal stress of chemical vapour deposition diamond film on silicon
(P31) (Q13442814)

(P304) 119-124

(P478) 253

(P577) +1994-12-00T00:00:00Z

(P1433) (Q2062139)

(P1476) "Internal stress of chemical vapour deposition diamond film on silicon" (language: en)

(P2093) Y. H. Chiou

C. T. Hwang

M. Y. Han

J. H. Jou

Y. S. Chang

H. C. Shih

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External Links
(P356) 10.1016/0040-6090(94)90305-0
(P5875) 248311511