Plasma Enhanced Chemical Vapour Deposition (PECVD) Of Silicon-Containing Wear Resistant Layers On Hard Metals (Q62656253)
conference paper
Language:
Current Data About Plasma Enhanced Chemical Vapour Deposition (PECVD) Of Silicon-Containing Wear Resistant Layers On Hard Metals
(P31) (Q23927052)

(Q13442814)

(P577) +1991-08-00T00:00:00Z

(P1476) "Plasma Enhanced Chemical Vapour Deposition (PECVD) Of Silicon-Containing Wear Resistant Layers On Hard Metals" (language: en)

(P2093) I. Endler

A. Leonhardt

E. Wolf

other details
description conference paper

External Links
(P5875) 256474049