Sources of Particle Contamination in an IC Manufacturing Environment (Q56965382)
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Current Data About Sources of Particle Contamination in an IC Manufacturing Environment
(P31) (Q13442814)

(P50) (Q7839206)
(P1545) 2
(P1932) T. Hastie

(P304) 43-50

(P407) (Q1860)

(P433) 1

(P478) 16

(P577) +1992-01-00T00:00:00Z

(P1433) (Q15766232)

(P1476) "Sources of Particle Contamination in an IC Manufacturing Environment" (language: en)

(P2093) L. A. Clark
(P1545) 1

L. A. Psota-Kelty
(P1545) 3

J. D. Sinclair
(P1545) 4

J. Rauchut
(P1545) 5

other details