Flexible mirror micromachined in silicon (Q51606594)
scientific article published on June 1, 1995
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Current Data About Flexible mirror micromachined in silicon
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(P304) 2968-2972
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(P577) Thursday, June 1, 1995
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(P1476) "Flexible mirror micromachined in silicon" (language: en)
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(P2093) G. Vdovin
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P. M. Sarro
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(P2860) (Q126464788)
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(Q56908256)
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other details
description scientific article published on June 1, 1995

External Links
(P356) 10.1364/AO.34.002968
(P698) 21052450
(P819) 1995ApOpt..34.2968V