High-κ gate dielectrics: Current status and materials properties considerations (Q29399514): Preview

High-κ gate dielectrics: Current status and materials properties considerations (Q29399514)
scientific article (publication date: 15 May 2001)

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Current Data About High-κ gate dielectrics: Current status and materials properties considerations

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(Q13442814)

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5243-5275

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(P813)	Friday, April 14, 2017

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(P854)	https://doi.org/10.1063%2F1.1361065
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(P577)

Tuesday, May 15, 2001

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(P854)	https://doi.org/10.1063%2F1.1361065
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"High-κ gate dielectrics: Current status and materials properties considerations" (language: en)

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(P854)	https://doi.org/10.1063%2F1.1361065
(P813)	Friday, April 14, 2017

(P2093)

G. D. Wilk

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(P813)	Friday, April 14, 2017

R. M. Wallace

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(P854)	https://doi.org/10.1063%2F1.1361065
(P813)	Friday, April 14, 2017

J. M. Anthony

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(P2860)

(Q29042234)

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(P813)	Monday, May 22, 2017

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other details

description	scientific article (publication date: 15 May 2001)

External Links

(P356)	10.1063/1.1361065
(P3181)	308942